Air damping of atomically thin MoS2 nanomechanical resonators
نویسندگان
چکیده
We report on experimental measurement of air damping effects in high frequency nanomembrane resonators made of atomically thin molybdenum disulfide (MoS2) drumhead structures. Circular MoS2 nanomembranes with thickness of monolayer, few-layer, and multi-layer up to 70 nm ( 100 layers) exhibit intriguing pressure dependence of resonance characteristics. In completely covered drumheads, where there is no immediate equilibrium between the drum cavity and environment, resonance frequencies and quality (Q) factors strongly depend on environmental pressure due to bulging of the nanomembranes. In incompletely covered drumheads, strong frequency shifts due to compressing-cavity stiffening occur above 200 Torr. The pressure-dependent Q factors are limited by free molecule flow (FMF) damping, and all the mono-, bi-, and tri-layer devices exhibit lower FMF damping than thicker, conventional devices do. VC 2014 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4890387]
منابع مشابه
The Effect of Viscous Air Damping on an Optically Actuated Multilayer MoS2 Nanomechanical Resonator Using Fabry-Perot Interference
We demonstrated a multilayer molybdenum disulfide (MoS₂) nanomechanical resonator by using optical Fabry-Perot (F-P) interferometric excitation and detection. The thin circular MoS₂ nanomembrane with an approximate 8-nm thickness was transferred onto the endface of a ferrule with an inner diameter of 125 μm, which created a low finesse F-P interferometer with a cavity length of 39.92 μm. The ef...
متن کاملHigh frequency MoS2 nanomechanical resonators.
Molybdenum disulfide (MoS2), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on t...
متن کاملNews: Putting a damper on nanoresonators.
The harmonic oscillator holds a special place in the history of science and technology, having an important role in the development of both classical and quantum physics. Examples include Galileo’s pendulum, resonant electrical circuits and molecular vibrations. In micro and nanomechanical systems, the prototypical harmonic oscillator is a mechanical resonator — a beam of material that oscillat...
متن کاملGraphene nanoelectromechanical systems as stochastic-frequency oscillators.
We measure the quality factor Q of electrically driven few-layer graphene drumhead resonators, providing an experimental demonstration that Q ∼ 1/T, where T is the temperature. We develop a model that includes intermodal coupling and tensioned graphene resonators. Because the resonators are atomically thin, out-of-plane fluctuations are large. As a result, Q is mainly determined by stochastic f...
متن کاملDesign strategies for controlling damping in micromechanical and nanomechanical resonators
Damping is a critical design parameter for miniaturized mechanical resonators used in microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), optomechanical systems, and atomic force microscopy for a large and diverse set of applications ranging from sensing, timing, and signal processing to precision measurements for fundamental studies of materials science and quantum mec...
متن کامل